Pre-clean and low resistance nano probe

• Product News
• ·
• 2020-09-09

MESOSCOPE is found from July of 2006 in Taipei, Taiwan

Since 2008, MESOSCOPE started to develop Nano Scale probe tip for SEM & STM system

We announced CR35 model for measuring devices below 28nm technology since 2012.

Till to 2019, What we achieved as following.

• MESOSCOPE has capability to provide the probe for analysis beyond 5nm technology process.
• Variety product for meeting different technology process failure analysis from above 180nm to beyond 5nm.

• Available to be loaded into different probing systems(ThermoFisher/ Hitachi / Kleindiek / Imina / JOEL) included the latest 4^th generation probing system. 
• Pre-bent is optionable. Easy for user to use it directly.
• MESOSCOPE’s Probe is able to be used directly without preforming any addition cleaning process.
• The standard lead time of each models is 3~4 weeks.
• Compare to other vendor’s probe resistance, MESOSCOPE’s is equal or lower than it.

Probe Resistance Value While De-pack

The total resistance is 59.88Ω, included two tips resistance and sample resistance.

Therefore, the single tip resistance is smaller than 30 Ω.

 

 

 

High Depth Width Ratio value is easier to land multiple probes on small area