Product
MSCT-MS060TPL012TC02A3-CR50
CR50 is ideal for failure analysis below 55nm to 90nm technology process.
Standard type has better durability.
- Available on Hitachi Nano probing system.
- No need to proceed Chemical Clean Process.
- Have SEM inspection before packing.
- Tip Resistance is under 50ohm.
- Have MESOSCOPE unique MST(Micro Surface Treatment) process to increase tip uniformity.
- Longer Cone Shrink Length for improving working aspect.
- Available to be measured below 55nm to 90nm device
Material | Tungsten | Coating Material | NA |
Wire Diameter ( WD) | 0.25mm | Total Probe Length(TPL) | 12mm |
Tape Cone ( TC) | 2mm | Capillary Diameter(CD) | 0.6mm |
Tape Cone Angle Type | A3 | Curvature Radius(CR) | <50nm |
Suitable for measuring Process | ≤55nm to 90nm Manufacturing Process |
MSCT | - | MS | 060 | TPL012 | TC02 | - | A3 | CR50 |
---|---|---|---|---|---|---|---|---|
(1) | (2) | (3) | (4) | (5) | (6) |
- Probe application type: MS is for Hitachi SEM based electrical nano-probing application.
- Copper Tube Diameter (CTD): 0.6mm
- Total probe length (TPL): 12mm
- Tape Cone length (TC): 2mm.
- Cone Angle type: A3
Available option: A2, A3 - Curvature radius (CR): <50nm.
Diameter at position of 50nm below apex is in the range of 80nm to 100nm.