MESOSCOPE Success to locate defect via EBIRCH from Mesoscope’s tips
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- 2020-06-19
Recently, MESOSCOPE success to use Kleindiek PS8 system and Mesoscope's tips to locate defect in transistor size level by E-Beam methodology at Laboratory of Mesoscope Technology.
First, we check that there is drain to source leak. And we find out the leak current is very small. The current is 3x10^-10.
Then, via methodology of EBIRCH to locate the defect. We setting bias from 4V to 3V and find out that the signal range is roughly. When performing bias at 2V, there is no signal.
4V
| SEM | EBIRCH | Overlay |
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3.5V
| SEM | EBIRCH | Overlay |
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3V
| SEM | EBIRCH | Overlay |
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2V
| SEM | EBIRCH | Overlay |
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At last, we could locate the defect clearly when setting the bias at 2.5V. There is a drain to source leak as below with red circle.
| SEM | EBIRCH | Overlay | |
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Mesoscope uses CR35B(curve rate 35nm) for the measurement. CR35B is suitable for the technology between 28nm to 45nm, and Mesoscope also pre-bent the tips. You could use Mesoscope’s tip directly without tip cross clean. Here is the introduction of CR35 as below:
| Type | Suitable for measuring Process | Feature |
| MSCT-SA025TPL013TC025A1-CR35 | 28nm~45nm |
Straight type.
Suitable for FEI, Kleindiek, Tescan, Joel and Zeiss system.
|
| MSCT-SA025TPL013TC025A1-CR35B | 28nm~45nm |
B type means “pre-bent”.
Suitable for FEI, Kleindiek, Tescan, Joel and Zeiss system.
|
| MSCT-SA025TPL013TC025A1-CR35BT | 28nm~45nm |
BT type means “pre-bent and sleeve into thermal/electrical demagnetized capillary”.
Suitable for FEI, Kleindiek, Tescan, Joel, Zeiss and Imina system.
|
| MSCT-SA025TPL013TC025A1-CR35BB | 28nm~45nm | BB type means “pre-bent and double bent”. |
| MS-CR35 | 28nm~45nm | Suitable for Hitachi system. |
To see more information, please check our website: http://www.mesoscope.com.tw/product/6/21
Following is a brief description about E-Beam application
|
Technique |
Method |
Object |
Defect Sorts |
Full Name of Technique |
|
EBAC |
absorb |
Metal Line |
open, short |
Electron Beam Absorbed Current |
|
EBIC |
e-p pair |
p-n junction |
p-n junction |
Electron Beam Induced Current |
|
EBIRCH |
Heat |
Different material |
short |
Electron Beam Induced Resistance Change |
|
RCI |
Absorb |
Metal line |
Local High R |
Resistive Contrast Imaging |
Feel free to contact with MESOSCOPE, if there is any idea or inquiry: +886-3-666-1059
